This English‑taught Master's degree prepares you to meet future challenges in micro- and nanoscale engineering. The curriculum spans the full lifecycle of miniaturised components — from conceptual design and fabrication to characterisation and system integration — giving you a broad, forward‑looking education in micro- and nano‑systems.
Courses combine interdisciplinary theoretical foundations in physics and engineering with practical, application‑oriented training. You will gain hands‑on experience in labs and project work that focus on electronic, micro‑mechanical and semiconductor components, aligning study topics with current and emerging needs in both industrial and academic research.
The programme is aimed at graduates who want to specialise further before moving into industry or research. It is particularly well suited to students planning careers in development, research & development, sensor and device engineering, or to those considering subsequent doctoral studies. Being taught in English makes the programme accessible to international applicants.
Entry requirements
This curriculum combines rigorous theory with hands‑on laboratory work to train students in the physics, materials, fabrication and design aspects of micro- and nano-scale systems. Core (compulsory) courses focus on semiconductor physics and nanostructures, heterogeneous system design and technologies for micro/nano systems, advanced integrated circuit technology, microsystems and device design, smart sensor systems, materials, and reliability — many of these include seminars and lab components so you gain practical experience with fabrication, measurement and design tools. Expect strong emphasis on device-level understanding (semiconductor and micro/nano devices), system integration (heterogeneous systems, microsystems design) and ensuring long-term performance (reliability, materials).
Elective modules let you tailor the degree toward device physics, materials, circuit design or application areas such as optoelectronics, power devices, sensors, flexible electronics or automotive systems. Electives vary in size (3–7 CP) and semester offered, so you can specialize by choosing a combination that totals the required 20 credit points. The program culminates in a substantial research project (semester 3) and a master’s thesis (semester 4), both carried out at the university, which develop independent research, experimental and simulation skills needed for industry roles or doctoral study.
Key learning outcomes include:
Requirements and curriculum structure
Compulsory subjects (total 50 CP):
Elective subjects (choose and pass options totalling 20 CP; listed with semester and format):
Research project (obligatory, performed at the university) – semester 3 – 20 CP
Master’s thesis (obligatory, performed at the university) – semester 4 – 30 CP
(Overall credit structure: 50 CP compulsory + 20 CP electives + 20 CP research project + 30 CP master’s thesis = 120 CP)
This master's program requires a completed bachelor's-level qualification in the relevant engineering field. Applicants who graduated from Chemnitz University of Technology with a Bachelor's degree in Electrical Engineering and Information Technology are directly eligible. International or alternative bachelor's degrees may also be considered if they are judged comparable.
Equivalence of degrees from other institutions is determined by the program’s board of examiners. If your prior qualification is not from Chemnitz, the board will review it and decide whether it meets the programme's entry standard.
Winter Semester (International)
15 July 2026
Summer Semester (International)
15 January 2027
Winter Semester (EU/EEA)
15 July 2026
Summer Semester (EU/EEA)
15 January 2027
Graduates are prepared for technical and development roles in industries working with micro- and nanoscale devices, including semiconductor companies, sensor and MEMS manufacturers, optoelectronics, flexible electronics and automotive sensor suppliers. Typical positions include R&D engineer, device/process development engineer, reliability/test engineer, and systems integration specialist. The programme’s combination of theory, hands-on labs and a substantial research project also equips students for roles in quality assurance, product development and technical consulting.
For those aiming at academic careers, the programme provides a solid foundation for pursuing a PhD in micro/nano systems, materials science or related electrical engineering fields. The emphasis on laboratory practice and research projects facilitates transition to research institutes and university research groups as well as collaboration with industry partners on applied research and development projects.
Offenburg University of Applied Sciences — Offenburg
RPTU University Kaiserslautern-Landau — Kaiserslautern
RWTH Aachen University — Aachen
Chemnitz University of Technology — Chemnitz