Master of Science in Micro- and Nanotechnologies

This Master's programme combines traditional microtechnology with cutting-edge nanotechnology, teaching the methods, tools and theoretical foundations needed for research and development of structures at micro- and nanoscales. The course is engineering science–oriented and interdisciplinary, aiming to provide a solid grounding in how micro- and nanostructures are created and how they can be integrated into larger systems. Graduates gain practical and conceptual skills to contribute to future advances and applications in micro- and nanotechnologies.

Instruction places special emphasis on both top‑down and bottom‑up manufacturing approaches: lithographic nanostructuring techniques (top‑down), molecular self‑assembly (bottom‑up), and strategies for combining these approaches. Training also covers the characterisation methods required to analyse structures and materials at these scales. Core technical areas include nanoelectronics and nanosensors, semiconductor technology, materials for micro/nano applications, micro- and nanostructuring technologies, microsystems technology and system integration, and microelectronic packaging and assembly.

Teaching and research are closely linked: the programme is supported by the Institute of Micro- and Nanotechnologies MacroNano® and its Centre of Micro- and Nanotechnologies, meaning students are engaged in research projects from an early stage. Hands‑on learning takes place in modern laboratory facilities—used as clean rooms for various classes—housed across two technology buildings, giving students practical experience with contemporary equipment and processes.

Key facts and entry-related points (as given in the programme description)

• Language of instruction: English
• Engineering science–oriented, interdisciplinary Master's programme
• Emphasis on both top‑down (lithographic) and bottom‑up (self‑assembly) approaches, plus their combination
• Core foci: nanotechnology, nanoelectronics, nanosensors, materials, micro/nanostructuring technologies, structure/material characterisation, semiconductors, microsystems/system integration, microelectronic packaging and assembly
• Strong research integration via the Institute MacroNano® and the Centre of Micro‑ and Nanotechnologies; early involvement in research projects
• Practical laboratory training in modern clean‑room facilities across two technology buildings

(Note: specific admission prerequisites, application deadlines and tuition/fee details are not provided in the original description; consult the programme’s official webpage or admissions office for those particulars.)

Curriculum overview

This MSc combines foundational science with engineering practice to deepen knowledge and skills acquired during undergraduate studies or professional experience in semiconductor technology, microelectronics, microtechnologies and nanotechnologies. The programme runs over four semesters: the first two deliver the required theoretical foundation while allowing early selection of specialisation modules and elective soft-skill courses; the third semester focuses on an advanced research project and further specialisation; the fourth semester is dedicated to the Master’s thesis, concluded with a colloquium.

The curriculum balances lecture-based theory, laboratory work and project-driven learning. Core teaching in the early semesters covers electronics, semiconductor devices, materials for micro/nano systems and diagnostic methods for nanoscale structures, while lab work includes materials handling and micro-/nanofabrication techniques. Project courses, a seminar and a final research thesis develop practical research skills, scientific communication and the ability to defend results publicly. International students without German are expected to take at least one German language course.

Graduates leave the programme able to apply advanced theoretical knowledge to the design, fabrication and analysis of micro- and nanotechnological systems, carry out independent research projects, select and pursue technical specialisations, and present and defend scientific work—preparing them for technical careers in industry or for further academic research (e.g., PhD).

Key modules and outcomes

• Semester 1

  • Electronics Technology 1
  • Semiconductor Devices 1
  • Materials of Micro- and Nanotechnologies
  • Nanodiagnostics
  • Nanotechnology
  • Introduction to Project Work
  • Soft Skills

• Semester 2

  • Microtechnologies 2
  • Lab Materials & Micro-/Nanofabrication
  • Continued Introduction to Project Work
  • Soft Skills
  • Advanced Studies (student-selected subjects related to the programme)

• Semester 3

  • Project with Seminar (advanced research project)
  • Advanced Studies (student-selected)
  • Technical Subject (choice from the entire Master’s curriculum)

• Semester 4

  • Master’s thesis with colloquium (thesis defense)

Core learning outcomes

• Deepened expertise in semiconductor technology, microelectronics and nanotechnologies.
• Ability to analyse and design semiconductor devices and nanoscale materials.
• Practical competence in micro-/nanofabrication and experimental diagnostics.
• Experience conducting and presenting independent research projects.
• Enhanced professional skills via soft-skill electives; basic German competency required for non-German speakers.

Graduates are prepared for R&D and development roles in industries working on semiconductors, microelectronics, nanosensors, materials engineering, microsystems and microelectronic packaging. The combination of theoretical knowledge, hands-on fabrication experience and characterisation skills makes alumni attractive to high-tech companies, research institutes and development labs.

Typical employers include micro- and nanoelectronics manufacturers, sensor and MEMS companies, materials research groups, and national or university research centres. Graduates are also well positioned to continue into PhD programmes in related fields.